Title: Tem study of ultrathin buried cobalt silicide layers formed by ion-beam synthesis
Authors: Vanhellemont, J ×
Maex, Karen
Wu, Mf
Romanorodriguez, A #
Issue Date: 1991
Publisher: Iop publishing ltd
Series Title: Institute of physics conference series issue:117 pages:311-314
Abstract: Results are presented of a TEM study of thin buried cobalt silicide layers formed by low energy, low dose cobalt ion implantation. Buried layer formation has been been studied both in (111) and (001) oriented substrates. Special attention is given to the CoSi2/Si interface quality, defect generation in the silicon substrate and pinhole formation in the ultrathin buried silicide layers.
ISSN: 0951-3248
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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