|ITEM METADATA RECORD
|Title: ||Distribution of metal contamination in SiO2/Si systems|
|Authors: ||Mertens, Paul|
De Gendt, Stefan
|Issue Date: ||1999 |
|Conference: ||Electrochemical Society Fall Meeting: 6th International Symposium on Cleaning Technology in Semiconductor Device Manufacturing; location:Leuven Belgium|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Clinical Residents Medicine|
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