Title: Distribution of metal contamination in SiO2/Si systems
Authors: Mertens, Paul
Jacobs, L
Goris, Katrien
Kenis, Karine
Loewenstein, Lee
Teerlinck, Ivo
Bearda, Twan
De Gendt, Stefan
Vos, Rita
Heyns, Marc
Issue Date: 1999
Conference: Electrochemical Society Fall Meeting: 6th International Symposium on Cleaning Technology in Semiconductor Device Manufacturing; location:Leuven Belgium
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Clinical Residents Medicine

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