|ITEM METADATA RECORD
|Title: ||Surface cleaning issues in thin-oxide technology|
|Authors: ||Mertens, Paul|
De Gendt, Stefan
|Issue Date: ||1999 |
|Conference: ||Semiconductor Interface Specialists' Conference; December 1999; Charleston, SC, USA. location:Leuven Belgium|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Clinical Residents Medicine|
Semiconductor Physics Section
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