Title: Surface cleaning issues in thin-oxide technology
Authors: Mertens, Paul
Bearda, Twan
Houssa, Michel
Loewenstein, Lee
Teerlinck, Ivo
De Gendt, Stefan
Vos, Rita
Kenis, Karine
Naili, Mohamed
Heyns, Marc
Issue Date: 1999
Conference: Semiconductor Interface Specialists' Conference; December 1999; Charleston, SC, USA. location:Leuven Belgium
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Clinical Residents Medicine
Semiconductor Physics Section

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