Title: Effect of metal contamination and improved cleaning strategies
Authors: Mertens, Paul ×
Bearda, Twan
Loewenstein, Lee
Martin Hoyas, Ana
Hub, W
Kolbesen, B. O
Teerlinck, Ivo
Vos, Rita
Baeyens, Martien
De Gendt, Stefan
Kenis, Karine
Heyns, Marc #
Issue Date: 1999
Host Document: pages:401-413
Conference: Defects in Silicon III; May 1999; Seattle, Wa, USA. location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Clinical Residents Medicine
Surface and Interface Engineered Materials
× corresponding author
# (joint) last author

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