This item still needs to be validated !
|ITEM METADATA RECORD
|Title: ||Out-of-plane electrostatic interdigitated actuator|
|Authors: ||Rottenberg, Xavier|
De Wolf, Ingrid
De Raedt, Walter
Tilmans, Harrie #
|Issue Date: ||2006 |
|Host Document: ||17th workshop on Micromachining, Micromechanics and Microsystems - MME pages:165-168|
|Conference: ||17th workshop on Micromachining, Micromechanics and Microsystems - MME edition:17 date:3 September 2006|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Electrical Engineering - miscellaneous|
ESAT- TELEMIC, Telecommunications and Microwaves
|Files in This Item:
There are no files associated with this item.
Request a copy
All items in Lirias are protected by copyright, with all rights reserved.