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Title: Out-of-plane electrostatic interdigitated actuator
Authors: Rottenberg, Xavier
Czarnecki, Piotr
Klaasse, Gerard
Nolmans, Philip
Mertens, Robert
Nauwelaers, Bart
De Wolf, Ingrid
De Raedt, Walter
Tilmans, Harrie #
Issue Date: 2006
Host Document: 17th workshop on Micromachining, Micromechanics and Microsystems - MME pages:165-168
Conference: 17th workshop on Micromachining, Micromechanics and Microsystems - MME edition:17 date:3 September 2006
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
ESAT- TELEMIC, Telecommunications and Microwaves
# (joint) last author

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