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Title: The nature of precursors for the thermal donor formation in silicon
Authors: Neimash, V. B ×
Puzenko, O. O
Kabaldin, O. M
Kraitchinskii, A. M
Kras'ko, M. M
Claeys, Cor
Simoen, Eddy #
Issue Date: 1999
Host Document: pages:351-356
Conference: Proceedings of the 8th International Autumn Meeting Gettering and Defect Engineering in Semiconductor Technology - GADEST; 25-28
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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