Title: A controlled deposition of organic contamination and the removal with ozone
Authors: Claes, M
De Gendt, Stefan
Kenens, Conny
Conard, Thierry
Bender, Hugo
Storm, Wolfgang
Lagrange, Sébastien
Mertens, Paul
Heyns, Marc
Issue Date: 2000
Conference: 5th International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS; 18-20 September 2000; Oostende, Belgium.
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Clinical Residents Medicine

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