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Title: Silicon material challenges for (sub) 100 nm technologies
Authors: Claeys, Cor
Issue Date: 2000
Conference: 10th Wacker Symposium; November 3, 2000; Burghausen, Germany.
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems

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