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Title: Radiation performance of shallow trench isolation
Authors: Claeys, Cor ×
Simoen, Eddy
Poyai, Amporn
Hayama, Kiyoteru
Kobayashi, K
Ohyama, Hidenori
Mohammadzadeh, A #
Issue Date: 2000
Host Document: pages:19-24
Conference: Proceedings of the 4th International Workshop on Radiation Effects on Semiconductor Devices for Space Applications; 11-13 Octobe
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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