Title: Qualification of spreading resistance probe operations II
Authors: Clarysse, Trudo ×
Vandervorst, Wilfried #
Issue Date: Jan-2000
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:18 issue:1 pages:381-388
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science