Title: Electrical characterization of ultrashallow dopant profiles
Authors: Clarysse, Trudo ×
Vandervorst, Wilfried
Collart, E. J. H
Murrell, A. J #
Issue Date: Sep-2000
Publisher: Electrochemical Society
Series Title: Journal of the Electrochemical Society vol:147 issue:9 pages:3569-3574
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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