ITEM METADATA RECORD
Title: High-resistivity silicon surface passivation for the thin-film MCM-D technology
Authors: Posada Quijano, Guillermo
Carchon, Geert
Soussan, Philippe
Poesen, Gert
Nauwelaers, Bart
De Raedt, Walter #
Issue Date: Jan-2006
Publisher: IEEE
Host Document: Proceedings 6th Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems pages:46-49
Conference: Proceedings 6th Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems edition:6 location:San Diego, California, US date:18 -20 January 2006
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT- TELEMIC, Telecommunications and Microwaves
Electrical Engineering - miscellaneous
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy

 




All items in Lirias are protected by copyright, with all rights reserved.

© Web of science