|ITEM METADATA RECORD
|Title: ||High-resistivity silicon surface passivation for the thin-film MCM-D technology|
|Authors: ||Posada Quijano, Guillermo|
De Raedt, Walter #
|Issue Date: ||Jan-2006 |
|Host Document: ||Proceedings 6th Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems pages:46-49|
|Conference: ||Proceedings 6th Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems edition:6 location:San Diego, California, US date:18 -20 January 2006|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||ESAT- TELEMIC, Telecommunications and Microwaves|
Electrical Engineering - miscellaneous
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