Title: Quantitative TOFSIMS depth profiling of ultra thin silicon oxynitride films
Authors: Conard, Thierry ×
De Witte, Hilde
Schaekers, Marc
Vandervorst, Wilfried #
Issue Date: 2000
Host Document: pages:381-384
Conference: Secondary Ion Mass Spectrometry - SIMS XII. Proceedings of the 12th International Conference; 5-10 Sept. 1999; Brussel, Belgium. location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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