Title: Influence of pre and post process conditions on the composition of thin Si3N4 thin films (3nm) studied by XPS and TOFSIMS
Authors: Conard, Thierry ×
De Witte, Hilde
Vandervorst, Wilfried
Houssa, Michel
Heyns, Marc
Pomarede, C
Werkhoven, Chris #
Issue Date: 2000
Host Document: pages:69-74
Conference: Structure and Electronic Properties of Ultrathin Dielectrics on Silicon and Related Structures; November 1999; Boston, MA, USA. location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
Semiconductor Physics Section
× corresponding author
# (joint) last author

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