Title: TOFSIMS evaluation of the removal of resists on silicon by ozone-based cleaning
Authors: Conard, Thierry ×
Kenens, Conny
De Gendt, Stefan
Claes, M
Lagrange, Sébastien
WorthA, W
Vandervorst, Wilfried #
Issue Date: 2000
Host Document: pages:631-634
Conference: Secondary Ion Mass Spectrometry - SIMS XII. Proceedings of the 12th International Conference; 5-10 Sept. 1999; Brussel, Belgium. location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.