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Title: Platinum: a thermally stable materials for RF-MEMS
Authors: Ekkels, Phillip ×
Puers, Robert
Tilmans, Harrie #
Issue Date: 2006
Host Document: pages:30-33
Conference: Proceedings 7th International Symposium on RF MEMS and RF Microsystems - MEMSWAVE location:Leuven Belgium date:27/06/06
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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