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Title: Influence of the Casimir force on the static and dynamic behavior of electrostatically driven micromechanical resonators
Authors: Stoffels, Steve ×
Fernandez, Luis J
Puers, Robert
Tilmans, Harrie #
Issue Date: 2006
Host Document: pages:499-502
Conference: Proceedings NSTI Nanotech - 9th International Conference on Modeling and Simulation of Microsystems location:Leuven Belgium date:07/05/06
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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