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Title: A surface micromachined electrostatically tunable film bulk acoustic resonator
Authors: Pan, Wanling ×
Soussan, Philippe
Nauwelaers, Bart
Tilmans, Harrie #
Issue Date: 14-Feb-2006
Publisher: Elsevier Science Pub. Co.
Series Title: Sensors and actuators. A: Physical vol:126 issue:2 pages:436-446
ISSN: 0924-4247
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
ESAT- TELEMIC, Telecommunications and Microwaves
× corresponding author
# (joint) last author

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