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Title: Effect of gas pressure on the lifetime of capacitive RF MEMS switches
Authors: Czarnecki, Piotr ×
Rottenberg, Xavier
Puers, Robert
De Wolf, Ingrid #
Issue Date: 2006
Publisher: IEEE
Host Document: pages:890-893
Conference: Proceedings 19th International Conference on Microelectromechanical Systems - MEMS location:Leuven Belgium date:22/01/06
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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