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|ITEM METADATA RECORD
|Title: ||Design and fabrication of a surface micromachined frequency tunable film bulk acoustic resonator with an extended electrostatic tuning range|
|Authors: ||Pan, Wanling|
Tilmans, Harrie #
|Issue Date: ||2005 |
|Host Document: ||Proceedings IEEE International Ultrasonics Symposium pages:1840-1843|
|Conference: ||Proceedings IEEE International Ultrasonics Symposium date:18 September 2005|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Electrical Engineering - miscellaneous|
ESAT- TELEMIC, Telecommunications and Microwaves
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