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Title: Design and fabrication of a surface micromachined frequency tunable film bulk acoustic resonator with an extended electrostatic tuning range
Authors: Pan, Wanling
Soussan, Philippe
Nauwelaers, Bart
Tilmans, Harrie #
Issue Date: 2005
Publisher: IEEE
Host Document: Proceedings IEEE International Ultrasonics Symposium pages:1840-1843
Conference: Proceedings IEEE International Ultrasonics Symposium date:18 September 2005
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
ESAT- TELEMIC, Telecommunications and Microwaves
# (joint) last author

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