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Title: Platinum membrane and polyimide sacrificial layer technology for RF-MEMS
Authors: Ekkels, Phillip ×
Puers, Robert
Tilmans, Harrie #
Issue Date: 2005
Host Document: pages:84-87
Conference: 16th MicroMechanics Europe Workshop - MME location:Leuven Belgium date:04/09/05
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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