Title: The influence of gas damping on the harmonic and transient response of MEMS devices
Authors: De Coster, Jeroen ×
Tilmans, Harrie
Steeneken, P.G
Puers, Robert #
Issue Date: 2005
Host Document: pages:300-303
Conference: 16th MicroMechanics Europe Workshop - MME location:Leuven Belgium date:04/09/05
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
ESAT - ELECTA, Electrical Energy Computer Architectures
× corresponding author
# (joint) last author

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