Title: Stress and stress gradient compensation technique for MEM actuators
Authors: Klaasse, Gerard ×
Puers, Robert
Tilmans, Harrie #
Issue Date: 2005
Publisher: EPFL
Host Document: pages:157-160
Conference: Proceedings of MEMSWAVE location:Leuven Belgium date:23/06/05
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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