|ITEM METADATA RECORD
|Title: ||Effects of UV-cure on mechanical, physical and electrical properties of microporous SiOC:H dielectric films|
|Authors: ||Iacopi, Francesca ×|
Sajavaara, Timo Pekka
Gage, David M
|Issue Date: ||2005 |
|Conference: ||MRS Spring Meeting Symposium B: Materials, Technology and Reliability of Advanced Interconnects location:San Francisco, CA, USA date:28/03/05|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Nuclear and Radiation Physics Section|
Associated Section of ESAT - INSYS, Integrated Systems
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