Title: Effects of UV-cure on mechanical, physical and electrical properties of microporous SiOC:H dielectric films
Authors: Iacopi, Francesca ×
Waldfried, Carlo
Abell, Thomas
Guyer, Eric
Eyckens, Brenda
Travaly, Youssef
Sajavaara, Timo Pekka
Gage, David M
Beyer, Gerald
Berry, Ivan
Dauskardt, Reinhold
Maex, Karen
Issue Date: 2005
Conference: MRS Spring Meeting Symposium B: Materials, Technology and Reliability of Advanced Interconnects location:San Francisco, CA, USA date:28/03/05
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Nuclear and Radiation Physics Section
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author

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