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Title: Threshold voltage control in PMOSFETs with polysilicon or fully-Silicided gates on Hf-based gate dielectric using controlled lateral oxidation
Authors: Kaushik, Vidya ×
Rohr, Erika
Hyun, S
De Gendt, Stefan
Van Elshocht, Sven
Delabie, Annelies
Everaert, Jean-Luc
Veloso, Anabela
Brus, Stephan
Ragnarsson, Lars-Ake
Richard, Olivier
Caymax, Matty
Heyns, Marc #
Issue Date: 2005
Publisher: ECS
Host Document: pages:305
Conference: Physics and Technology if High-k Gate Dielectrics III location:Leuven Belgium date:16/10/05
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Molecular Design and Synthesis
× corresponding author
# (joint) last author

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