Title: Ru/Ta alloying behavior and its implications for laminate based CMOS integration
Authors: Lisoni, Judit ×
Schram, Tom
Witters, Thomas
Van Hoornick, Nausikaa
Yamada, Naoki
De Gendt, Stefan #
Issue Date: 2006
Publisher: MRS
Host Document: pages:0917-E08-04
Conference: Gate Stack Scaling - Materials Selection, Role of Interfaces, and Reliability Implications location:Leuven Belgium date:17/04/06
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Molecular Design and Synthesis
× corresponding author
# (joint) last author

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