Title: Plasma immersion ion implantation for shallow junctions in silicon
Authors: Pinter, Istvan ×
Abdulhadi, A. H
Makaro, Z
Khanh, N. Q
Adam, M
Barsony, I
Poortmans, Jef
Sivoththaman, Sivanarayanamoorthy
Hai-Zhi, Song
Adriaenssens, Guy #
Issue Date: 1999
Series Title: Applied Surface Science vol:138-139 pages:224-227
ISSN: 0169-4332
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Semiconductor Physics Section
× corresponding author
# (joint) last author

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