Title: In-line and non-destructive analysis of epitaxial Si1-x-yGexCy
Authors: Loo, Roger ×
Delhougne, Romain
Geenen, Luc
Brijs, Bert
Vandervorst, Wilfried
Meunier-Beillard, Philippe
Koumoto, T #
Issue Date: 2004
Series Title: Yield Management Solutions vol:6 issue:2 pages:40-47
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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