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Title: Surface characterization of a low dielectric constant polymer-SiLK polymer, and investigation of its interface with Cu
Authors: Rajagopal, A ×
Grégoire, Colette
Lemaire, J. J
Pireaux, J. J
Baklanov, Mikhaïl
Vanhaelemeersch, Serge
Maex, Karen
Waeterloos, Joost #
Issue Date: Sep-1999
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:17 issue:5 pages:2336-2340
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
Natural Resources Section
× corresponding author
# (joint) last author

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