Title: Suppression of phosphorus diffusion by carbon co-implantation
Authors: Pawlak, Bartek ×
Duffy, Ray
Janssens, Tom
Vandervorst, Wilfried
Felch, S.B
Collart, E.J.H
Cowern, N.E.B #
Issue Date: Aug-2006
Series Title: Applied Physics Letters vol:89 issue:6 pages:62102
ISSN: 0003-6951
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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