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Title: Degradation and breakdown of sub-1nm EOT HfO2/metal gate stacks
Authors: Groeseneken, Guido ×
Degraeve, Robin
Kauerauf, Thomas
Cho, MoonJu
Zahid, Mohammed
Ragnarsson, Lars-Ake
Brunco, David
Kaczer, Ben
Roussel, Philippe
De Gendt, Stefan #
Issue Date: Sep-2006
Host Document: pages:1118-1119
Conference: Extended Abstracts of the International Conference on Solid State Devices and Materials - SSDM location:Leuven Belgium date:12/09/06
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
Molecular Design and Synthesis
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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