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|ITEM METADATA RECORD
|Title: ||Degradation and breakdown of sub-1nm EOT HfO2/metal gate stacks|
|Authors: ||Groeseneken, Guido ×|
De Gendt, Stefan #
|Issue Date: ||Sep-2006 |
|Host Document: ||pages:1118-1119|
|Conference: ||Extended Abstracts of the International Conference on Solid State Devices and Materials - SSDM location:Leuven Belgium date:12/09/06|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Electrical Engineering - miscellaneous|
Associated Section of ESAT - INSYS, Integrated Systems
Molecular Design and Synthesis
ESAT - MICAS, Microelectronics and Sensors
× corresponding author|
# (joint) last author|
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