Title: Gas-phase surface proessing prior to 3.2nm gate oxidation
Authors: Ruzyllo, Jerzy ×
Röhr, Erika
Baeyens, Martien
Bearda, Twan
Mertens, Paul
Heyns, Marc #
Issue Date: 1999
Host Document: pages:85-88
Conference: Ultra Clean Processing of Silicon Surfaces; Proceedings of the 4th International Symposium on Ultra Clean Processing of Silicon
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Clinical Residents Medicine
Surface and Interface Engineered Materials
× corresponding author
# (joint) last author

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