Title: Fluorine in thermal oxides from HF preoxidation surface treatments
Authors: Ruzyllo, Jerzy ×
Röhr, Erika
Baeyens, Martien
Mertens, Paul
Heyns, Marc #
Issue Date: 1999
Series Title: Electrochemical and Solid-State Letters vol:2 issue:7 pages:336-338
ISSN: 1099-0062
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Clinical Residents Medicine
Surface and Interface Engineered Materials
× corresponding author
# (joint) last author

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