Title: Role of UV/chlorine exposure during dry surface conditioning before integrated epi deposition process
Authors: Ruzyllo, Jerzy ×
Röhr, Erika
Caymax, Matty
Baeyens, Martien
Conard, Thierry
Mertens, Paul
Heyns, Marc #
Issue Date: 1999
Host Document: pages:233-236
Conference: Ultra Clean Processing of Silicon Surfaces; Proceedings of the 4th International Symposium on Ultra Clean Processing of Silicon
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Clinical Residents Medicine
Surface and Interface Engineered Materials
× corresponding author
# (joint) last author

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