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|ITEM METADATA RECORD
|Title: ||Rinsing and drying issues during the post CMP cleaning process|
|Authors: ||Fyen, Wim ×|
Van Steenbergen, Jan
Lee, Kim #
|Issue Date: ||2004 |
|Host Document: ||pages:112-119|
|Conference: ||21st International VLSI Multilevel Interconnection Conference - VMIC location:Leuven Belgium date:30/09/04|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Clinical Residents Medicine|
× corresponding author|
# (joint) last author|
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