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Title: Leakage mechanism in a porous organic low-k polymer
Authors: Li, Yunlong ×
Tokei, Zsolt
Maex, Karen #
Issue Date: Oct-2004
Series Title: Microelectronic Engineering vol:76 issue:01/04/07 pages:20-24
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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