Title: Influence of gate oxide reliability on FinFET characteristics
Authors: Fernandez, Raul ×
Kaczer, Ben
Rodriguez, Rosana
Nafria, Montserat
Groeseneken, Guido
Aymerich, X #
Issue Date: 2006
Conference: 2nd Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits - EUROSOI location:Barcelona Spain date:08/03/06
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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