Title: Determination of the Young's modulus of poly-SiGe micromachined structures using novel mechanical actuation test techniques
Authors: Van Barel, Greg ×
Modlinski, Robert
Mastrangeli, Massimo
Witvrouw, Ann #
Issue Date: Sep-2006
Host Document: Proceedings Eurosensors
Conference: Proceedings XX Eurosensors location:Goteborg, Sweden date:Sept 17-20 2006
Article number: W1B-P18
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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