Title: Selective sidewall airgap integration for deep submicrometer interconnects
Authors: Gueneau de Mussy, Jean Paul ×
Richard, Olivier
Beyer, Gerald
Maex, Karen #
Issue Date: 2004
Series Title: Electrochemical and Solid-State Letters vol:7 issue:11 pages:G286-G289
ISSN: 1099-0062
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science