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Title: 45nm nMOSFET with metal gate on thin SiON driving 1150µA/µm and off-state of 10nA/µm
Authors: Henson, Kirklen ×
Lander, Rob
Demand, Marc
Dachs, Charles
Kaczer, Ben
Deweerd, Wim
Schram, Tom
Tokei, Zsolt
Hooker, Jacob
Cubaynes, Florence
Beckx, Stephan
Boullart, Werner
Coenegrachts, Bart
Vertommen, Johan
Richard, Olivier
Bender, Hugo
Vandervorst, Wilfried
Kaiser, M
Everaert, Jean-Luc
Jurczak, Malgorzata
Biesemans, Serge #
Issue Date: 2004
Publisher: IEEE
Host Document: pages:851-854
Conference: Technical Digest International Electron Devices Meeting - IEDM location:Leuven Belgium date:13/12/04
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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