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|ITEM METADATA RECORD
|Title: ||The Carbon co-implant with spike RTA solution for Phosphorus extension|
|Authors: ||Pawlak, Bartek ×|
Cowern, N #
|Issue Date: ||2006 |
|Host Document: ||pages:0912-C01-06|
|Conference: ||Doping Engneering for Device Fabrication location:Leuven Belgium date:17/04/06|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
Electrical Engineering - miscellaneous
× corresponding author|
# (joint) last author|
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