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Title: The Carbon co-implant with spike RTA solution for Phosphorus extension
Authors: Pawlak, Bartek ×
Duffy, R
Augendre, Emmanuel
Severi, Simone
Janssens, Tom
Absil, Philippe
Vandervorst, Wilfried
Collart, Erik
Felch, Susan
Schreutelkamp, Rob
Cowern, N #
Issue Date: 2006
Publisher: MRS
Host Document: pages:0912-C01-06
Conference: Doping Engneering for Device Fabrication location:Leuven Belgium date:17/04/06
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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