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Title: Thin epitaxial Si films as a passivation method for (100) Ge: influence of deposition temperature on Ge surface segregation and the high-k/Ge interface quality
Authors: Leys, Frederik ×
Bonzom, Renaud
Kaczer, Ben
Janssens, Tom
Vandervorst, Wilfried
De Jaeger, Brice
Van Steenbergen, Jan
Martens, Koen
Hellin, David
Rip, Jens
Dilliway, Gabriela
Delabie, Annelies
Zimmerman, Paul
Houssa, Michel
Theuwis, A.
Loo, Roger
Meuris, Marc
Caymax, Matty
Heyns, Marc #
Issue Date: Aug-2006
Publisher: Pergamon
Series Title: Materials Science in Semiconductor Processing vol:9 issue:4-5 pages:679-684
ISSN: 1369-8001
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Molecular Design and Synthesis
Department of Materials Engineering - miscellaneous
× corresponding author
# (joint) last author

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