Title: Physico Chemical Aspects of Hydrogen Peroxide Based Silicon Wafer Cleaning Solutions
Authors: Schmidt, Harald ×
Meuris, Marc
Mertens, Paul
Rotondaro, Antonio
Heyns, Marc
Hurd, Trace
Hatcher, Z #
Issue Date: 1994
Host Document: pages:259-266
Conference: Proceedings 2nd International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS); September 19-21, 1994; Brugge, Be location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Clinical Residents Medicine
Surface and Interface Engineered Materials
× corresponding author
# (joint) last author

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