Title: Polymer dielectric treatment using UV-ozone: a photoelectron spectroscopy and ellipsometric porosimetry study
Authors: Le, Quoc Toan ×
Whelan, Caroline
Struyf, Herbert
Vanhaelemeersch, Serge
Azioune, A
Louette, P
Pireaux, J-J
Maex, Karen #
Issue Date: Oct-2004
Series Title: Journal of Applied Physics vol:96 issue:7 pages:3807-3810
ISSN: 0021-8979
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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