Title: Surface modification of porous low-k dielectrics
Authors: Le, Quoc Toan
Struyf, Herbert
Brongersma, Sywert
Conard, Thierry
Boullart, Werner
Vanhaelemeersch, Serge
Maex, Karen
Issue Date: 2003
Publisher: Electrochemical Society
Conference: Thin Film Materials, Processes and Reliability location:Paris France date:29/04/03
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems

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