Title: Surface modification of porous low-k dielectrics
Authors: Le, Quoc Toan ×
Struyf, Herbert
Brongersma, Sywert
Conard, Thierry
Boullart, Werner
Vanhaelemeersch, Serge
Maex, Karen #
Issue Date: 2003
Publisher: Electrochemical Society
Conference: Thin Film Materials, Processes and Reliability location:Paris France date:29/04/03
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science