|ITEM METADATA RECORD
|Title: ||Surface modification of porous low-k dielectrics|
|Authors: ||Le, Quoc Toan|
|Issue Date: ||2003 |
|Publisher: ||Electrochemical Society|
|Conference: ||Thin Film Materials, Processes and Reliability location:Paris France date:29/04/03|
|Publication status: ||published|
|KU Leuven publication type: ||IMa|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
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