Title: Impact of direct plasma hydrogenation on thermal donor formation in N-type CZ silicon
Authors: Rafi, Joan Marc ×
Simoen, Eddy
Claeys, Corneel
Huang, Y.L
Ulyashin, A.G
Job, R
Versluys, J
Clauws, P
Lozano, M
Campabadal, F #
Issue Date: 2005
Series Title: Journal of the Electrochemical Society vol:152 issue:1 pages:G16-G24
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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