|ITEM METADATA RECORD
|Title: ||Understanding adhesion failure in low-k dielectric stacks during chemical mechanical polishing|
|Authors: ||Iacopi, Francesca ×|
Maex, Karen #
|Issue Date: ||Jan-2004 |
|Conference: ||Thin Film - Stresses and Mechanical Properties X location:Boston, MA, USA date:01/12/03|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
× corresponding author|
# (joint) last author|
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