Title: Understanding adhesion failure in low-k dielectric stacks during chemical mechanical polishing
Authors: Iacopi, Francesca ×
Degryse, Dominiek
Vos, Ingrid
Patz, Michael
Maex, Karen #
Issue Date: Jan-2004
Publisher: MRS
Conference: Thin Film - Stresses and Mechanical Properties X location:Boston, MA, USA date:01/12/03
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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