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Title: Enhanced performance of PMOS MUGFET via integration of conformal plasma-doped source/drain extensions
Authors: Lenoble, Damien ×
Kottantharayil, Anil
De Keersgieter, An
Eyben, Pierre
Collaert, Nadine
Rooyackers, Rita
Brus, Stephan
Zimmerman, Paul
Goodwin, Michael
Vanhaeren, Danielle
Vandervorst, Wilfried
Radovanov, S
Godet, Lucien
Cardinaud, C
Biesemans, Serge
Skotnicki, Thomas
Jurczak, Malgorzata #
Issue Date: Jun-2006
Publisher: IEEE
Host Document: pages:212-213
Conference: Symposium on VLSI Technology. Digest of Technical Papers location:Leuven Belgium date:13/06/06
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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