Title: Analytical characterization of new high k dielectric stacks
Authors: De Witte, Hilde
Conard, Thierry
Bender, Hugo
Vandervorst, Wilfried
Issue Date: 2000
Conference: Quantitative Surface Analysis-11; 3-7 July 2000; Surrey, UK.
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous

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