|ITEM METADATA RECORD
|Title: ||XPS study of ion induced oxidation of silicon with and without oxygen flooding|
|Authors: ||De Witte, Hilde ×|
Gijbels, Renaat #
|Issue Date: ||2000 |
|Host Document: ||pages:73-76|
|Conference: ||Secondary Ion Mass Spectrometry - SIMS XII. Proceedings of the 12th International Conference; 5-10 Sept. 1999; Brussel, Belgium.|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Electrical Engineering - miscellaneous|
× corresponding author|
# (joint) last author|
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