Title: XPS study of ion induced oxidation of silicon with and without oxygen flooding
Authors: De Witte, Hilde ×
Conard, Thierry
Sporken, R
Gouttebaron, R
Magnée, R
Vandervorst, Wilfried
Caudano, R
Gijbels, Renaat #
Issue Date: 2000
Host Document: pages:73-76
Conference: Secondary Ion Mass Spectrometry - SIMS XII. Proceedings of the 12th International Conference; 5-10 Sept. 1999; Brussel, Belgium.
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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